Self-organized nanoscale Ge dots and dashes on SiGe/Si superlattices

Journal of Applied Physics

Volumn 98, Issue 2, 2005, Pages

  Fitting, L ^a   Ware, M E ^a   Haywood, J R ^a   Walter, Jennifer J H ^a   Nemanich, R J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GE DOTS; GE NANOSTRUCTURES; MICROELECTRONIC DEVICES; SILICON SUBSTRATES;

DEPOSITION; EPITAXIAL GROWTH; INTERFACIAL ENERGY; LATTICE CONSTANTS; LAYERED MANUFACTURING; MULTILAYERS; NANOSTRUCTURED MATERIALS; OPTOELECTRONIC DEVICES; SEMICONDUCTOR SUPERLATTICES; SILICON; SUBSTRATES;

SEMICONDUCTING GERMANIUM;

EID: 23844483520     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1993751     Document Type: Article

References (16)

1. H. Omi and T. Ogino, Appl. Phys. Lett. 71, 2163 (1997).
2. P. Schittenhelm, G. Abstreiter, A. Darhuber, G. Bauer, P. Werner, and A. Kosogov, Thin Solid Films 294, 291 (1997).
3. G. Abstreiter, P. Schittenhelm, C. Engel, E. Silveira, A. Zrenner, D. Meertensand, and W. Jäger, Semicond. Sci. Technol. 11, 1521 (1996).
4. Y.-W. Mo, D. E. Savage, B. S. Swartzentruber, and M. G. Lagally, Phys. Rev. Lett. 65, 1020 (1990).
5. J.-H. Zhu, K. Brunner, G. Abstreiter, O. Kienzle, and F. Ernst, Thin Solid Films 336, 252 (1998).
6. J. Tersoff, C. Teichert, and M. G. Lagally, Phys. Rev. Lett. 76, 1675 (1996)
7. Q. Xie, A. Madhukar, P. Chen, and N. P. Kobayashi, Phys. Rev. Lett. 75, 2542 (1995).
8. M. E. Ware, R. J. Nemanich, J. L. Gray, and R. Hull, J. Appl. Phys. 95, 115 (2003).
9. M. E. Ware, Ph.D. Dissertation, North Carolina State University, 2002.
10. C. Teichert, M. G. Lagally, L. J. Peticolas, J. C. Bean, and J. Tersoff, Phys. Rev. B, 53, 16334 (1996).
11. K. Brunner, J. Zhu, C. Miesner, G. Abstreiter, O. Kienzle, and F. Ernst, Physica E (Amsterdam) 7, 881 (2000).
12. A. A. Baski, S. C. Erwin, and L. J. Whiteman, Surf. Sci. 392, 69 (1997).
13. J.-h. Zhu, K. Brunner, and G. Abstreiter, Appl. Phys. Lett. 73, 620 (1998).
14. A. Ronda, M. Abdallah, J. M. Gay, J. Stettner, and I. Berbezier, Appl. Surf. Sci. 162-163, 576 (2000).
15. I. Berbezier, A. Ronda, and A. Portavoce, J. Phys.: Condens. Matter 14, 8283 (2002).
16. J. Tersoff and R. M. Tromp, Phys. Rev. Lett. 70, 2782 (1993).