Rapid fabrication of microcomponents - UV-laser assisted prototyping, laser micro-machining of mold inserts and replication via photomolding

Microsystem Technologies

Volumn 9, Issue 1-2, 2003, Pages 67-74

  Pfleging, W ^a   Bernauer, W ^a   Hanemann, T ^a   Torge, M ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; EXCIMER LASERS; FUNCTIONS; HELIUM; LASER ABLATION; MOLDS; MONOMERS; POLYMERS; RAPID PROTOTYPING; REACTION INJECTION MOLDING; STEEL; ULTRAVIOLET RADIATION;

LIGA TECHNOLOGY; MICROCOMPONENTS; PHOTOMOLDING; RAPID FABRICATION;

MICROMACHINING;

EID: 4344666624     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0197-3     Document Type: Article

References (10)

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4. Heckele M; Müller KD; Bacher W (1999) Microstructured plastic foils produced by hot embossing. Proc Harmst 99, Kisarazu, pp. 84-85
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9. Pfleging W; Hanemann T; Bernauer W; Torge M (2001) Laser micromachining of mold inserts for replication techniques - State-of-the-art and applications. SPIE Proc 4274: 331-345
10. Shimizu T; Murakoshi Y; Sano T; Maeda R; Sugiyama S (1998) Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method. Microsyst Technolo 5: 90-92