Fabrication of polymer cantilevers for force controlled atomic force microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5183, Issue , 2003, Pages 71-78

  Kato, Nobuhiro ^a   Park, Choong Sik ^b   Matsumoto, Toshiro ^a   Kikuta, Hisao ^c   Iwata, Koichi ^c  

^a KINKI UNIVERSITY   (Japan)

^b OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^c Osaka Prefecture University   (Japan)

Author keywords

AFM; Cantilever; Force control; Laser writing; Polyimide

Indexed keywords

ACTUATORS; ANISOTROPY; ATOMIC FORCE MICROSCOPY; BANDWIDTH; DAMPING; ETCHING; FEEDBACK; FORCE CONTROL; LITHOGRAPHY; NATURAL FREQUENCIES; PHOTORESISTS; POLYIMIDES; STIFFNESS; ULTRAHIGH VACUUM;

CANTILEVER VIBRATIONS; LASER WRITING; NEGATIVE PHOTO RESIST; POLYMER CANTILEVER;

PLASTIC PRODUCTS;

EID: 2342545579     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505434     Document Type: Conference Paper

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