Force-balancing microforce sensor with an optical-fiber interferometer

Review of Scientific Instruments

Volumn 68, Issue 6, 1997, Pages 2475-2478

  Kato, Nobuhiro ^a   Suzuki, Ippei ^a   Kikuta, Hisao ^a   Iwata, Koichi ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; ELECTRODES; ELECTROSTATICS; FEEDBACK; INTERFEROMETERS; MIRRORS; OPTICAL COATINGS; OPTICAL FIBERS; PARAMETER ESTIMATION; PROBES; THIN FILMS;

DEFLECTION MEASUREMENT; FORCE BALANCING MICROFORCE SENSOR; FORCE FEEDBACK METHOD; INTERACTION FORCE; MICROCANTILEVER; SCANNING FORCE MICROSCOPY;

OPTICAL SENSORS;

EID: 0031162449     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148171     Document Type: Article

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