Residual surface oxide on ZrV getter - XPS, LEIS and SIMS study

Vacuum

Volumn 74, Issue 2, 2004, Pages 305-309

  Sutara F ^a   Matolinova I ^a   Skala T ^a   Masek K ^a   Matolin V ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Alloys; Getters; Low energy ion scattering; Secondary ion mass spectrometry; Vanadium; X ray photoelectron spectroscopy; Zirconium

Indexed keywords

BINARY ALLOYS; CHEMICAL ACTIVATION; OXIDATION; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIA; ZIRCONIUM ALLOYS;

NON-EVAPORABLE GETTERS (NEG); RESIDUAL SURFACE OXIDES;

GETTERS;

EID: 2342465582     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.144     Document Type: Conference Paper

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