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Volumn 48, Issue 8, 2004, Pages 1401-1406

Comparison of sub-micron Si:SiGe heterojunction nFETs to Si nMOSFET in present-day technologies

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CORRELATION METHODS; CURRENT VOLTAGE CHARACTERISTICS; MATHEMATICAL MODELS; MOSFET DEVICES; SILICON; SILICON WAFERS; THRESHOLD VOLTAGE; TRANSCONDUCTANCE;

EID: 2342462324     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2004.01.017     Document Type: Article
Times cited : (12)

References (12)
  • 3
    • 0034227743 scopus 로고    scopus 로고
    • Fabrication and analysis of deep submicron strained-Si N-MOSFET's
    • Rim K.K., Hoyt J.L., Gibbons J.F. Fabrication and analysis of deep submicron strained-Si N-MOSFET's. IEEE Trans. Electron. Dev. 47(7):2000;1406-1415.
    • (2000) IEEE Trans. Electron. Dev. , vol.47 , Issue.7 , pp. 1406-1415
    • Rim, K.K.1    Hoyt, J.L.2    Gibbons, J.F.3
  • 5
    • 0038236498 scopus 로고    scopus 로고
    • Gate-source-drain architecture impact on DC and RF performance of sub-100 nm elevated source/drain NMOS transistors
    • Jeamsaksiri W., Jurczak M., Grau L., Linten D., Augendre E., De Potter M., et al. Gate-source-drain architecture impact on DC and RF performance of sub-100 nm elevated source/drain NMOS transistors. IEEE Trans. Electron. Dev. 50(3):2003;610-617.
    • (2003) IEEE Trans. Electron. Dev. , vol.50 , Issue.3 , pp. 610-617
    • Jeamsaksiri, W.1    Jurczak, M.2    Grau, L.3    Linten, D.4    Augendre, E.5    De Potter, M.6
  • 6
    • 0035473542 scopus 로고    scopus 로고
    • Effect of thermal processing on strain relaxation and interdiffusion in Si/SiGe heterostructures studied using Raman spectroscopy
    • Koester S.J., Rim K., Chu J.O., Mooney P.M., Ott J.A., Hargrove M.A. Effect of thermal processing on strain relaxation and interdiffusion in Si/SiGe heterostructures studied using Raman spectroscopy. Appl. Phys. Lett. 79(14):2001;2148-2150.
    • (2001) Appl. Phys. Lett. , vol.79 , Issue.14 , pp. 2148-2150
    • Koester, S.J.1    Rim, K.2    Chu, J.O.3    Mooney, P.M.4    Ott, J.A.5    Hargrove, M.A.6
  • 10
    • 0028383440 scopus 로고
    • Electron-mobility enhancement in strained-Si n-type metal-oxide- semiconductor field-effect transistors
    • Welser J., Hoyt J.L., Gibbons J.F. Electron-mobility enhancement in strained-Si n-type metal-oxide-semiconductor field-effect transistors. Trans. Electron. Dev. 15(3):1994;100-102.
    • (1994) Trans. Electron. Dev. , vol.15 , Issue.3 , pp. 100-102
    • Welser, J.1    Hoyt, J.L.2    Gibbons, J.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.