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Electrochemical and Solid-State Letters

Volumn 7, Issue 5, 2004, Pages

Quality improvement in LPCVD silicon nitrides by anodic and rapid thermal oxidations

(2) Lin, Yen Po a Hwu, Jenn Gwo a

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LEAKAGE CURRENTS; MASS SPECTROMETRY; MOS DEVICES; OXIDATION; PROBABILITY; QUANTUM THEORY; X RAY PHOTOELECTRON SPECTROSCOPY;

DANGLING BONDS; DEIONIZED (DI) WATER; NITRIDE FILMS; THERMAL OXIDATION;

SILICON NITRIDE;

EID: 2342462246 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1664053 Document Type: Article

Times cited : (5)

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