메뉴 건너뛰기




Volumn 52, Issue 8, 2005, Pages 1698-1705

Transient thermal characterization of AlGaN/GaN HEMTs grown on silicon

Author keywords

GaN; High electron mobility transistor (HEMT); Optical characterization; Thermal characterization; Thermal resistance

Indexed keywords

GALLIUM NITRIDE; HEAT RESISTANCE; HEAT TRANSFER; INTERFEROMETRY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON NITRIDE;

EID: 23344432789     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2005.852172     Document Type: Article
Times cited : (82)

References (33)
  • 1
    • 0029275117 scopus 로고
    • "GaN MESFETs for high-frequency and high-temperature microwave applications"
    • Mar.
    • M. W. Shin and R. J. Trew, "GaN MESFETs for high-frequency and high-temperature microwave applications," Electron. Lett., vol. 31, no. 6, pp. 498-500, Mar. 1995.
    • (1995) Electron. Lett. , vol.31 , Issue.6 , pp. 498-500
    • Shin, M.W.1    Trew, R.J.2
  • 2
    • 0032595863 scopus 로고    scopus 로고
    • "Evaluation of the temperature stability of AlGaN/GaN heterostructure FETs"
    • Sep.
    • I. Daumiller, C. Kirchner, M. Kamp, K. J. Ebeling, and E. Kohn, "Evaluation of the temperature stability of AlGaN/GaN heterostructure FETs," IEEE Electron Device Lett., vol. 20, no. 9, pp. 448-450, Sep. 1999.
    • (1999) IEEE Electron Device Lett. , vol.20 , Issue.9 , pp. 448-450
    • Daumiller, I.1    Kirchner, C.2    Kamp, M.3    Ebeling, K.J.4    Kohn, E.5
  • 3
    • 0037030470 scopus 로고    scopus 로고
    • "Switching behavior of GaN-based HFETs: Thermal and electronics transients"
    • Jun.
    • E. Kohn, I. Daumiller, M. Kunze, J. Van Nostrand, J. Sewell, and T. Jenkins, "Switching behavior of GaN-based HFETs: Thermal and electronics transients," Electron. Lett., vol. 38, no. 38, pp. 603-605, Jun. 2002.
    • (2002) Electron. Lett. , vol.38 , Issue.38 , pp. 603-605
    • Kohn, E.1    Daumiller, I.2    Kunze, M.3    Van Nostrand, J.4    Sewell, J.5    Jenkins, T.6
  • 5
  • 6
    • 0036733922 scopus 로고    scopus 로고
    • "Thermal conductivity of GaN films: Effects of impurities and dislocations"
    • Sep.
    • J. Zou, D. Kotchetkov, A. A. Balandin, D. I. Florescu, and F. H. Pollak, "Thermal conductivity of GaN films: Effects of impurities and dislocations," J. Appl. Phys., vol. 95, no. 5, pp. 2534-2539, Sep. 2002.
    • (2002) J. Appl. Phys. , vol.95 , Issue.5 , pp. 2534-2539
    • Zou, J.1    Kotchetkov, D.2    Balandin, A.A.3    Florescu, D.I.4    Pollak, F.H.5
  • 7
    • 18644362092 scopus 로고    scopus 로고
    • "Optical pump-and-probe measurement of the thermal conductivity of nitride thin films"
    • Oct.
    • B. C. Daly, H. J. Maris, A. V. Nurmikko, M. Kuball, and J. Han, "Optical pump-and-probe measurement of the thermal conductivity of nitride thin films," J. Appl. Phys., vol. 92, no. 7, pp. 3820-3824, Oct. 2002.
    • (2002) J. Appl. Phys. , vol.92 , Issue.7 , pp. 3820-3824
    • Daly, B.C.1    Maris, H.J.2    Nurmikko, A.V.3    Kuball, M.4    Han, J.5
  • 9
    • 0004167140 scopus 로고    scopus 로고
    • ser. Springer Series in Materials Science. New York: Springer-Verlag
    • H. Morkoc, Nitride Semiconductors and Devices, ser. Springer Series in Materials Science. New York: Springer-Verlag, 1999, pp. 102-109.
    • (1999) Nitride Semiconductors and Devices , pp. 102-109
    • Morkoc, H.1
  • 10
    • 7544231369 scopus 로고    scopus 로고
    • "Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films"
    • Oct.
    • Y. Zhao, Ch. Zhu, S. Wang, J. Z. Tian, D. J. Yang, C. K. Chen, H. Cheng, and P. Hing, "Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films," J. Appl. Phys., vol. 96, no. 8, pp. 4563-4568, Oct. 2004.
    • (2004) J. Appl. Phys. , vol.96 , Issue.8 , pp. 4563-4568
    • Zhao, Y.1    Zhu, Ch.2    Wang, S.3    Tian, J.Z.4    Yang, D.J.5    Chen, C.K.6    Cheng, H.7    Hing, P.8
  • 11
    • 0346921027 scopus 로고    scopus 로고
    • The effect of the thermal boundary resistance on self-heating of AlGaN/ GaN HFETs
    • [Online]. Available
    • K. A. Filippov and A. A. Balandin. (2003) The effect of the thermal boundary resistance on self-heating of AlGaN/GaN HFETs. MRS Internet J. Nitride Semicond. Res. [Online]. Available: http://nsr.mij.mrs.org/ 8/4/
    • (2003) MRS Internet J. Nitride Semicond. Res.
    • Filippov, K.A.1    Balandin, A.A.2
  • 12
    • 0346499648 scopus 로고    scopus 로고
    • "Performance degradation of GaN field-effect transistors due to thermal boundary resistance at GaN/substrate interface"
    • Jan.
    • V. O. Turin and A. A. Balandin, "Performance degradation of GaN field-effect transistors due to thermal boundary resistance at GaN/ substrate interface," Electron. Lett., vol. 40, no. 1, pp. 81-83, Jan. 2004.
    • (2004) Electron. Lett. , vol.40 , Issue.1 , pp. 81-83
    • Turin, V.O.1    Balandin, A.A.2
  • 13
    • 0038189731 scopus 로고    scopus 로고
    • "Electricfield-induced heating and energy relaxation in GaN"
    • May
    • T. A. Eckhause, Ö. Süzer, C. Kurdak, F. Yun, and H. Morkoc, "Electricfield-induced heating and energy relaxation in GaN," Appl. Phys. Lett., vol. 82, no. 18, pp. 3035-3037, May 2003.
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.18 , pp. 3035-3037
    • Eckhause, T.A.1    Süzer, Ö.2    Kurdak, C.3    Yun, F.4    Morkoc, H.5
  • 14
    • 0042378607 scopus 로고    scopus 로고
    • "Atomic arrangement at the AlN/Si (111) interface"
    • Aug.
    • R. Liu, F. A. Ponce, A. Dadgar, and A. Krost, "Atomic arrangement at the AlN/Si (111) interface," Appl. Phys. Lett., vol. 83, no. 5, pp. 860-862, Aug. 2003.
    • (2003) Appl. Phys. Lett. , vol.83 , Issue.5 , pp. 860-862
    • Liu, R.1    Ponce, F.A.2    Dadgar, A.3    Krost, A.4
  • 18
    • 0037421410 scopus 로고    scopus 로고
    • "Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy"
    • Jan.
    • M. Kuball, S. Rajasingam, A. Sarua, M. J. Uren, T. Martin, B. T. Hughes, K. P. Hilton, and R. S. Balmer, "Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy," Appl. Phys. Lett., vol. 82, no. 1, pp. 124-126, Jan. 2003.
    • (2003) Appl. Phys. Lett. , vol.82 , Issue.1 , pp. 124-126
    • Kuball, M.1    Rajasingam, S.2    Sarua, A.3    Uren, M.J.4    Martin, T.5    Hughes, B.T.6    Hilton, K.P.7    Balmer, R.S.8
  • 19
    • 0038009800 scopus 로고    scopus 로고
    • "Device temperature measurement of highly biased AlGaN/GaN high-electron-mobility transistors"
    • Apr.
    • N. Shigekawa, K. Onodera, and K. Shiojima, "Device temperature measurement of highly biased AlGaN/GaN high-electron-mobility transistors," Jpn. J. Appl. Phys., vol. 42, no. 4B, pp. 2245-2249, Apr. 2003.
    • (2003) Jpn. J. Appl. Phys. , vol.42 , Issue.4 B , pp. 2245-2249
    • Shigekawa, N.1    Onodera, K.2    Shiojima, K.3
  • 20
    • 0036779119 scopus 로고    scopus 로고
    • "AlGaN/GaN HFETs fabricated on 100-mm GaN on silicon (111) substrates"
    • Oct.
    • J. D. Brown, R. Borges, E. Piner, A. Vescan, S. Singhal, and R. Therrien, "AlGaN/GaN HFETs fabricated on 100-mm GaN on silicon (111) substrates," Solid State Electron., vol. 46, no. 10, pp. 1535-1539, Oct. 2002.
    • (2002) Solid State Electron. , vol.46 , Issue.10 , pp. 1535-1539
    • Brown, J.D.1    Borges, R.2    Piner, E.3    Vescan, A.4    Singhal, S.5    Therrien, R.6
  • 21
    • 8144230248 scopus 로고    scopus 로고
    • "Thermal modeling and measurement of AlGaN-GaN HFETs built on Sapphire and SiC substrates"
    • Nov.
    • J. Park, M. W. Shin, and Ch. C. Lee, "Thermal modeling and measurement of AlGaN-GaN HFETs built on Sapphire and SiC substrates," IEEE Trans. Electron Devices, vol. 51, no. 11, pp. 1753-1759, Nov. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.11 , pp. 1753-1759
    • Park, J.1    Shin, M.W.2    Lee, Ch.C.3
  • 22
    • 0036684666 scopus 로고    scopus 로고
    • "Determination of channel temperature in AlGaN/GaN HEMTs grown on sapphire and silicon substrates using DC characterization method"
    • Aug.
    • J. Kuzmík, P. Javorka, A. Alam, M. Marso, M. Heuken, and P. Kordoš, "Determination of channel temperature in AlGaN/GaN HEMTs grown on sapphire and silicon substrates using DC characterization method," IEEE Trans. Electron Devices, vol. 49, no. 8, pp. 1496-1498, Aug. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.8 , pp. 1496-1498
    • Kuzmík, J.1    Javorka, P.2    Alam, A.3    Marso, M.4    Heuken, M.5    Kordoš, P.6
  • 23
    • 0036866034 scopus 로고    scopus 로고
    • "Quantitative internal thermal energy mapping of semiconductor devices under short current stress using backside laser interferometry"
    • Nov.
    • D. Pogany, S. Bychikhin, Ch. Fürböck, M. Litzenberger, E. Gornik, G. Groos, K. Esmark, and M. Stecher, "Quantitative internal thermal energy mapping of semiconductor devices under short current stress using backside laser interferometry," IEEE Trans. Electron Devices, vol. 49, no. 11, pp. 2070-2078, Nov. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.11 , pp. 2070-2078
    • Pogany, D.1    Bychikhin, S.2    Fürböck, Ch.3    Litzenberger, M.4    Gornik, E.5    Groos, G.6    Esmark, K.7    Stecher, M.8
  • 24
    • 0346215996 scopus 로고    scopus 로고
    • "Electrostatic discharge effects in AlGaN/GaN high-electron-mobility transistors"
    • Dec.
    • J. Kuzmík, D. Pogany, E. Gornik, P. Javorka, and P. Kordoš, "Electrostatic discharge effects in AlGaN/GaN high-electron-mobility transistors," Appl. Phys. Lett., vol. 83, no. 22, pp. 4655-4657, Dec. 2003.
    • (2003) Appl. Phys. Lett. , vol.83 , Issue.22 , pp. 4655-4657
    • Kuzmík, J.1    Pogany, D.2    Gornik, E.3    Javorka, P.4    Kordoš, P.5
  • 25
    • 79955988150 scopus 로고    scopus 로고
    • "Extraction of spatio-temporal distribution of power dissipation in semiconductor devices using nanosecond interferometric mapping technique"
    • Oct.
    • D. Pogany, S. Bychikhin, M. Litzenberger, G. Groos, and M. Stecher, "Extraction of spatio-temporal distribution of power dissipation in semiconductor devices using nanosecond interferometric mapping technique," Appl. Phys. Lett., vol. 81, no. 15, pp. 2881-2883, Oct. 2002.
    • (2002) Appl. Phys. Lett. , vol.81 , Issue.15 , pp. 2881-2883
    • Pogany, D.1    Bychikhin, S.2    Litzenberger, M.3    Groos, G.4    Stecher, M.5
  • 26
    • 0036965549 scopus 로고    scopus 로고
    • "GaN-based devices on Si"
    • A. Krost and A. Dadgar, "GaN-based devices on Si," Phys. Stat. Sol. (a), vol. 194, no. 2, pp. 361-375, 2002.
    • (2002) Phys. Stat. Sol. (a) , vol.194 , Issue.2 , pp. 361-375
    • Krost, A.1    Dadgar, A.2
  • 27
    • 33644484960 scopus 로고    scopus 로고
    • "Unstrained InAlN/GaN FET"
    • presented at the IEEE Lester Eastman Conference on High Performance Devices, Troy, NY, Aug. 4-6
    • M. Neuburger, T. Zimmermann, M. Kunze, I. Daumiller, A. Dadgar, J. Bläsing, A. Krost, and E. Kohn, "Unstrained InAlN/GaN FET," presented at the IEEE Lester Eastman Conference on High Performance Devices, Troy, NY, Aug. 4-6, 2004.
    • (2004)
    • Neuburger, M.1    Zimmermann, T.2    Kunze, M.3    Daumiller, I.4    Dadgar, A.5    Bläsing, J.6    Krost, A.7    Kohn, E.8
  • 28
    • 0029253695 scopus 로고
    • "Direct determination of source, drain and channel resistances of HEMTs"
    • Feb.
    • Y. Zhu, Y. Ishimaru, and M. Shimizu, "Direct determination of source, drain and channel resistances of HEMTs," Electron. Lett., vol. 31, no. 4, pp. 318-320, Feb. 1995.
    • (1995) Electron. Lett. , vol.31 , Issue.4 , pp. 318-320
    • Zhu, Y.1    Ishimaru, Y.2    Shimizu, M.3
  • 31
    • 0000452347 scopus 로고
    • "Temperature dependence of the near-infrared refractive index of silicon, galium arsenide, and indium phospide"
    • Mar.
    • J. A. McCaulley, V. M. Donnelly, M. Vernon, and I. Taha, "Temperature dependence of the near-infrared refractive index of silicon, galium arsenide, and indium phospide," Phys. Rev. B, Condens. Matter, vol. 49, no. 11, pp. 7408-7417, Mar. 1994.
    • (1994) Phys. Rev. B, Condens. Matter , vol.49 , Issue.11 , pp. 7408-7417
    • McCaulley, J.A.1    Donnelly, V.M.2    Vernon, M.3    Taha, I.4
  • 32
    • 33644483619 scopus 로고
    • M. Levinshtein, S.L. Rumyantsev, M.S. Shur, Eds., World Scientific, Singapore
    • Handbook Series on Semiconductor Parameters, vol. 1, M. Levinshtein, S. L. Rumyantsev, and M. S. Shur, Eds., World Scientific, Singapore, 1966, pp. 1-31.
    • (1966) Handbook Series on Semiconductor Parameters , vol.1 , pp. 1-31
  • 33
    • 33644484723 scopus 로고    scopus 로고
    • Internal Report, Tech. Univ. Vienna, Vienna, Austria, Jan.
    • J. Kuzmík, S. Bychikhin, and D. Pogany, Internal Report, Tech. Univ. Vienna, Vienna, Austria, Jan. 2005.
    • (2005)
    • Kuzmík, J.1    Bychikhin, S.2    Pogany, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.