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Volumn 489, Issue 1-2, 2005, Pages 17-22
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ZrO2 thin films with controllable morphology and thickness by spin-coated sol-gel method
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Author keywords
Atomic force microscopy; Surface morphology; Surface coated solgel; Ultra thin film; Zirconium dioxide
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
HYDROLYSIS;
MORPHOLOGY;
SOL-GELS;
SOLID ELECTROLYTES;
SOLVENTS;
SPIN COATING;
SPUTTERING;
ZIRCONIA;
SURFACE COATED SOLGEL;
ULTRA-THIN FILMS;
ZIRCONIUM DIOXIDE;
THIN FILMS;
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EID: 23144446912
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2005.04.076 Document Type: Article |
Times cited : (62)
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References (18)
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