SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 488, Issue 1-2, 2005, Pages 26-33

Growth and Rutherford backscattering spectrometry study of direct current sputtered indium oxide films

(3) Malar, P a Mohanty, Bhaskar Chandra a Kasiviswanathan, S a

a INDIAN INSTITUTE OF TECHNOLOGY MADRAS (India)

Author keywords

Indium oxide; Rutherford backscattering spectrometry; Transmission electron microscopy (TEM); X ray diffraction

Indexed keywords

DIFFUSION; EVAPORATION; FILM GROWTH; FLAT PANEL DISPLAYS; INDIUM COMPOUNDS; INTERFACES (MATERIALS); MICROSTRUCTURE; PHOTODIODES; POLYCRYSTALLINE MATERIALS; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING; STOICHIOMETRY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ATOMIC CONCENTRATION; INCIDENT ENERGY; INDIUM OXIDE; REACTIVE SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROMETRY;

THIN FILMS;

EID: 23044486892 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.04.019 Document Type: Article

Times cited : (13)

References (45)

1
- 79955998728
- S. Marsillac, P.D. Paulson, M.W. Haimbodi, R.W. Birkmire, and W.N. Shafarman Appl. Phys. Lett. 81 2002 1350
- (2002) Appl. Phys. Lett. , vol.81 , pp. 1350
- Marsillac, S.¹ Paulson, P.D.² Haimbodi, M.W.³ Birkmire, R.W.⁴ Shafarman, W.N.⁵

2
- 0036475114
- William J. Lee, Yean-Kuen Fang, Jyh-Jier Ho, Chin-Ying Chen, Rung-Ywan Tsai, Daoyang Huang, Fang C. Ho, H.W. Chou, and C.C. Chen J. Electron. Mater. 31 2002 129
- (2002) J. Electron. Mater. , vol.31 , pp. 129
- Lee, W.J.¹ Yean-Kuen, F.² Jyh-Jier, H.³ Chin-Ying, C.⁴ Rung-Ywan, T.⁵ Daoyang, H.⁶ Ho, F.C.⁷ Chou, H.W.⁸ Chen, C.C.⁹

3
- 0344080456
- N. Biyikli, I. Kimukin, T. Kartaloglu, O. Aytur, and E. Ozbay Appl. Phys. Lett. 82 2003 2344
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2344
- Biyikli, N.¹ Kimukin, I.² Kartaloglu, T.³ Aytur, O.⁴ Ozbay, E.⁵

4
- 36549099749
- I. Hamberg, and C.G. Granqvist J. Appl. Phys. 60 1986 R123
- (1986) J. Appl. Phys. , vol.60
- Hamberg, I.¹ Granqvist, C.G.²

5
- 0021097455
- K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1983 1
- (1983) Thin Solid Films , vol.102 , pp. 1
- Chopra, K.L.¹ Major, S.² Pandya, D.K.³

6
- 0028763884
- H. Fritzsche, B. Pashmakov, and B. Claflin Sol. Energy Mater. Sol. Cells 32 1994 383
- (1994) Sol. Energy Mater. Sol. Cells , vol.32 , pp. 383
- Fritzsche, H.¹ Pashmakov, B.² Claflin, B.³

7
- 14544285107
- G. Kiriakidis, H. Ouacha, and N. Katsarakis Rev. Adv. Mater. Sci. 4 2003 32
- (2003) Rev. Adv. Mater. Sci. , vol.4 , pp. 32
- Kiriakidis, G.¹ Ouacha, H.² Katsarakis, N.³

8
- 0033726608
- R. Winter, K. Scharnagl, A. Fuchs, T. Doll, and I. Eisele Sens. Actuators, B 66 2000 85
- (2000) Sens. Actuators, B , vol.66 , pp. 85
- Winter, R.¹ Scharnagl, K.² Fuchs, A.³ Doll, T.⁴ Eisele, I.⁵

9
- 0010973895
- G. Kiriakidis, N. Katsarakis, M. Bender, E. Gagaoudakis, and V. Cimalla Mater. Phys. Mech. 1 2000 83
- (2000) Mater. Phys. Mech. , vol.1 , pp. 83
- Kiriakidis, G.¹ Katsarakis, N.² Bender, M.³ Gagaoudakis, E.⁴ Cimalla, V.⁵

10
- 0004359213
- C.A. Pan, and T.P. Ma Appl. Phys. Lett. 37 1980 163
- (1980) Appl. Phys. Lett. , vol.37 , pp. 163
- Pan, C.A.¹ Ma, T.P.²

11
- 0035868177
- Jun-Sik Cho, K.H. Yoon, and Seok-Keun Koh J. Appl. Phys. 89 2001 3223
- (2001) J. Appl. Phys. , vol.89 , pp. 3223
- Jun-Sik, C.¹ Yoon, K.H.² Seok-Keun, K.³

12
- 0031207747
- A.N.H. Al-Ajili, and S.C. Bayliss Thin Solid Films 305 1997 116
- (1997) Thin Solid Films , vol.305 , pp. 116
- Al-Ajili, A.N.H.¹ Bayliss, S.C.²

13
- 36449008865
- S. Kasiviswanathan, and G. Rangarajan J. Appl. Phys. 75 1994 2572
- (1994) J. Appl. Phys. , vol.75 , pp. 2572
- Kasiviswanathan, S.¹ Rangarajan, G.²

14
- 36449000875
- E.J. Tarsa, J.H. English, and J.S. Speck Appl. Phys. Lett. 62 1993 2332
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2332
- Tarsa, E.J.¹ English, J.H.² Speck, J.S.³

15
- 0034605426
- S. Suh, and D.M. Hoffmamn J. Am. Chem. Soc. 122 2000 9396
- (2000) J. Am. Chem. Soc. , vol.122 , pp. 9396
- Suh, S.¹ Hoffmamn, D.M.²

16
- 0029358129
- G. Eftekhari Semicond. Sci. Technol. 10 1995 1159
- (1995) Semicond. Sci. Technol. , vol.10 , pp. 1159
- Eftekhari, G.¹

17
- 84957128231
- H. Matsunami, K. Oo, H. Ito, and T. Tanaka Jpn. J. Appl. Phys., Part 1 14 1975 915
- (1975) Jpn. J. Appl. Phys., Part 1 , vol.14 , pp. 915
- Matsunami, H.¹ Oo, K.² Ito, H.³ Tanaka, T.⁴

18
- 0004427976
- A. Golan, Y. Shapira, and M. Eizenberg J. Appl. Phys. 72 1992 925
- (1992) J. Appl. Phys. , vol.72 , pp. 925
- Golan, A.¹ Shapira, Y.² Eizenberg, M.³

19
- 0005239860
- V. Korobov, Y. Shapira, B. Ber, K. Faleev, and D. Zushinskiy J. Appl. Phys. 75 1994 2264
- (1994) J. Appl. Phys. , vol.75 , pp. 2264
- Korobov, V.¹ Shapira, Y.² Ber, B.³ Faleev, K.⁴ Zushinskiy, D.⁵

20
- 0029378164
- S.A. Bashar, and A.A. Rezazadeh IEEE Trans. Microw. Theor. Tech. 43 1995 2299
- (1995) IEEE Trans. Microw. Theor. Tech. , vol.43 , pp. 2299
- Bashar, S.A.¹ Rezazadeh, A.A.²

21
- 0028380740
- M.A. Matin, A.F. Jezierski, S.A. Bashar, D.E. Lacklison, T.M. Benson, T.S. Cheng, J.S. Roberts, T.E. Sale, J.W. Orton, C.T. Foxon, and A.A. Rezazadeh Electron. Lett. 30 1994 318
- (1994) Electron. Lett. , vol.30 , pp. 318
- Matin, M.A.¹ Jezierski, A.F.² Bashar, S.A.³ Lacklison, D.E.⁴ Benson, T.M.⁵ Cheng, T.S.⁶ Roberts, J.S.⁷ Sale, T.E.⁸ Orton, J.W.⁹ Foxon, C.T.¹⁰ Rezazadeh, A.A.¹¹

22
- 0039885768
- T.J. Cunningham, L.J. Guido, J.C. Beggy, and R.C. Barker J. Appl. Phys. 71 1992 1070
- (1992) J. Appl. Phys. , vol.71 , pp. 1070
- Cunningham, T.J.¹ Guido, L.J.² Beggy, J.C.³ Barker, R.C.⁴

23
- 19244372886
- K. Kuwano I, and S. Ashok Appl. Surf. Sci. 117/118 1997 629
- (1997) Appl. Surf. Sci. , vol.117-118 , pp. 629
- Kuwano, K.I.¹ Ashok, S.²

24
- 0010384548
- X. Li, M.W. Wanlass, T.A. Gessert, K.A. Emery, and T.J. Coutts Appl. Phys. Lett. 54 1989 2674
- (1989) Appl. Phys. Lett. , vol.54 , pp. 2674
- Li, X.¹ Wanlass, M.W.² Gessert, T.A.³ Emery, K.A.⁴ Coutts, T.J.⁵

25
- 0003659399
- J.M. Poate K.N. Tu J.W. Mayer The Electrochemical Society Inc Princeton
- J.M. Poate, K.N. Tu, and J.W. Mayer J.M. Poate K.N. Tu J.W. Mayer Thin Films-Interdiffusion and Reactions 1978 The Electrochemical Society Inc Princeton 1
- (1978) Thin Films-Interdiffusion and Reactions , pp. 1
- Poate, J.M.¹ Tu, K.N.² Mayer, J.W.³

26
- 0042714418
- H. Ofner, Y. Shapira, and F.P. Netzer J. Appl. Phys. 76 1994 1196
- (1994) J. Appl. Phys. , vol.76 , pp. 1196
- Ofner, H.¹ Shapira, Y.² Netzer, F.P.³

27
- 0026395801
- J.M.M. de Nijs, C. Carvalho, M. Santos, and R. Martins Appl. Surf. Sci. 52 1991 339
- (1991) Appl. Surf. Sci. , vol.52 , pp. 339
- De Nijs, J.M.M.¹ Carvalho, C.² Santos, M.³ Martins, R.⁴

28
- 0027625785
- S.V. Kolluri, and A.N. Chandorkar Thin Solid Films 230 1993 39
- (1993) Thin Solid Films , vol.230 , pp. 39
- Kolluri, S.V.¹ Chandorkar, A.N.²

29
- 0019056692
- L.L. Kazmerski, P.J. Ireland, P. Sheldon, T.L. Chu, S.S. Chu, and C.L. Lin J. Vac. Sci Technol. 17 1980 1061
- (1980) J. Vac. Sci Technol. , vol.17 , pp. 1061
- Kazmerski, L.L.¹ Ireland, P.J.² Sheldon, P.³ Chu, T.L.⁴ Chu, S.S.⁵ Lin, C.L.⁶

30
- 0000974740
- C.W. Ow-Yang, Y. Shigessato, and D.C. Paine J. Appl. Phys. 88 2000 3717
- (2000) J. Appl. Phys. , vol.88 , pp. 3717
- Ow-Yang, C.W.¹ Shigessato, Y.² Paine, D.C.³

31
- 0037114359
- S. Roy, S. Basu, C. Jacob, and A.K. Tyagi Appl. Surf. Sci. 202 2002 73
- (2002) Appl. Surf. Sci. , vol.202 , pp. 73
- Roy, S.¹ Basu, S.² Jacob, C.³ Tyagi, A.K.⁴

32
- 36849111467
- D.J. Ball J. Appl. Phys. 43 1972 3047
- (1972) J. Appl. Phys. , vol.43 , pp. 3047
- Ball, D.J.¹

33
- 0022075813
- L. Doolittle Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 9 1985 344
- (1985) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms , vol.9 , pp. 344
- Doolittle, L.¹

34
- 0001670828
- J.R. Cameron Phys. Rev. 90 1953 839
- (1953) Phys. Rev. , vol.90 , pp. 839
- Cameron, J.R.¹

35
- 0004198677
- Academic Press Inc. London
- W.K. Chu, J.W. Mayer, and M.A. Nicolet Backscattering Spectrometry 1978 Academic Press Inc. London
- (1978) Backscattering Spectrometry
- Chu, W.K.¹ Mayer, J.W.² Nicolet, M.A.³

36
- 0031096684
- A. Markwitz, J.L. Ruvalcaba-Sil, and G. Demortier Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 122 1997 685
- (1997) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms , vol.122 , pp. 685
- Markwitz, A.¹ Ruvalcaba-Sil, J.L.² Demortier, G.³

37
- 0006751085
- Powder Diffraction File Joint Committee on Powder Diffraction Standards, JCPDS-ICDD, Pennsylvania, Card 06-0416
- Powder Diffraction File, PCPDFWIN, Version 1.30, Joint Committee on Powder Diffraction Standards, JCPDS-ICDD, Pennsylvania, 1997, Card 06-0416.
- (1997) PCPDFWIN, Version 1.30

38
- 21544433576
- J.P. Zheng, and H.S. Kwok Appl. Phys. Lett. 63 1993 1
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1
- Zheng, J.P.¹ Kwok, H.S.²

39
- 0002915590
- Georg Hass Maurice H. Francombe Richard W. Hoffman Academic Press New York
- J.L. Vossen Georg Hass Maurice H. Francombe Richard W. Hoffman Physics of Thin Films vol. 9 1977 Academic Press New York 1
- (1977) Physics of Thin Films , vol.9 , pp. 1
- Vossen, J.L.¹

40
- 0003720630
- McGraw Hill New York
- M. Hansen, and K. Anderko Constitution of Binary Alloys 1958 McGraw Hill New York
- (1958) Constitution of Binary Alloys
- Hansen, M.¹ Anderko, K.²

41
- 0003477976
- VCH Weinheim, Germany
- I. Barin Thermochemical Data of Pure Substances vols. I and II 1989 VCH Weinheim, Germany
- (1989) Thermochemical Data of Pure Substances , vol.12
- Barin, I.¹

42
- 1642621158
- B.E. Deal, and A.S. Grove J. Appl. Phys. 36 1965 3770
- (1965) J. Appl. Phys. , vol.36 , pp. 3770
- Deal, B.E.¹ Grove, A.S.²

43
- 0021466317
- R. Beyers J. Appl. Phys. 56 1984 147
- (1984) J. Appl. Phys. , vol.56 , pp. 147
- Beyers, R.¹

44
- 0001130362
- B. Claflin, and H. Fritzsche J. Electron. Mater. 25 1996 1772
- (1996) J. Electron. Mater. , vol.25 , pp. 1772
- Claflin, B.¹ Fritzsche, H.²

45
- 5544325473
- Bo-Rong Shi, and N. Cue J. Phys. D: Appl. Phys. 29 1996 419
- (1996) J. Phys. D: Appl. Phys. , vol.29 , pp. 419
- Bo-Rong, S.¹ Cue, N.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.