SCOPUS 정보 검색 플랫폼

Volumn 14, Issue 8, 2005, Pages 1348-1352

Synthesis and characterization of superhard aluminum carbonitride thin films

Author keywords

Aluminum carbonitride; Hardness; Magnetron sputtering; Thin film

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; BONDING; HARDNESS; MAGNETRON SPUTTERING; MORPHOLOGY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM CARBONITRIDE; BINARY MATERIALS; CYANIDE CRYSTAL;

THIN FILMS;

EID: 22944471479 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.01.036 Document Type: Conference Paper

Times cited : (19)

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