Ion assisted deposition of thin films by substrate tuned radio frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 62-65

  Lousa, A ^a   Gimeno, S ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031538620     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580477     Document Type: Article

References (18)

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