Elastic modulus measurement of thin film using a dynamic method

Journal of Electronic Materials

Volumn 26, Issue 9, 1997, Pages 1002-1008

  Kim, Youngman ^a  

^a Chonnam National University   (South Korea)

Author keywords

Beam vibration theory; Elastic modulus; Thin film

Indexed keywords

EID: 0000911750     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0237-y     Document Type: Article

References (19)

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