Future media manufacturing-more than just conventional sputtering

IEEE Transactions on Magnetics

Volumn 36, Issue , 2000, Pages 67-72

  Cord, B ^a   Scherer, J ^a  

^a Balzers Process Systems   (Germany)

Author keywords

Magnetic disks; Sputtering; Vacuum deposition

Indexed keywords

COERCIVE FORCE; MAGNETIC MOMENTS; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SIGNAL TO NOISE RATIO; SPUTTER DEPOSITION; SUBSTRATES; SURFACE CLEANING; TEMPERATURE; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYER DEPOSITION; SUBSTRATE CLEANING; SUBSTRATE TEMPERATURE;

HARD DISK STORAGE;

EID: 0033893020     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.824427     Document Type: Article

References (8)

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