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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3341-3343

Nanomechanical switch formed by focused-ion-beam chemical vapor deposition

(4) Morita, Takahiko a,b Kanda, Kazuhiro a,b Haruyama, Yuichi a,b Matsui, Shinji a,b

b JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

Focused ion beam chemical vapor deposition; Free space nanowiring; Nanomechanical switch; Phenanthrene; Tungsten hexacarbonyl

Indexed keywords

AROMATIC HYDROCARBONS; CURRENT VOLTAGE CHARACTERISTICS; ENERGY DISPERSIVE SPECTROSCOPY; ION BEAMS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; TUNGSTEN;

FOCUSED ION-BEAM CHEMICAL VAPOR DEPOSITION; FREE-SPACE-NANOWIRING; NANOMECHANICAL SWITCHES; PHENANTHRENE; TUNGSTEN HEXACARBONYL;

CHEMICAL VAPOR DEPOSITION;

EID: 22544480792 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.3341 Document Type: Article

Times cited : (6)

References (7)

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