High-purity, isotopically enriched bulk silicon

Journal of the Electrochemical Society

Volumn 152, Issue 6, 2005, Pages

  Ager III, J W ^a   Beeman, J W ^a   Hansen, W L ^a   Haller, E E ^a   Sharp, I D ^a   Liao, C ^a   Yang, A ^b   Thewalt, M L W ^b   Riemann, H ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b SIMON FRASER UNIVERSITY   (Canada)

^c LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CORROSION; CRYSTAL GROWTH; ISOTOPES; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL);

BULK SILICON; OPTICAL MEASUREMENT; SIEMENS PROCESS; STABLE ISOTOPES;

SILICON;

EID: 22544479460     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1901674     Document Type: Article

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