Transient thermo-reflectance measurements of the thermal conductivity and interface resistance of metallized natural and isotopically-pure silicon

Microelectronics Journal

Volumn 34, Issue 12 SPEC.ISS., 2003, Pages 1115-1118

  Komarov, Pavel L ^a   Burzo, Mihai G ^a   Kaytaz, Gunhan ^a   Raad, Peter E ^a  

^a Southern Methodist University   (United States)

Author keywords

Boron doping; Epitaxial layer; Isotopically pure silicon 28; Natural silicon; Thermal conductivity; Transient thermoreflectance method

Indexed keywords

CONTINUOUS WAVE LASERS; EPITAXIAL GROWTH; NEODYMIUM LASERS; PHONONS; REFLECTION; SEMICONDUCTING BORON; SEMICONDUCTOR DOPING; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

THERMO-REFLECTANCE;

SILICON;

EID: 0242406724     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00201-5     Document Type: Conference Paper

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