Highly reliable piezoelectric actuator for precision stage system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3307-3312

  Hashiguchi, Hiroyuki ^a   Egashira, Yoshiya ^b   Furukawa, Hiroyuki ^a   Endo, Taishi ^a   Kosaka, Tetsuya ^c   Kosaka, Koji ^a,c   Uozumi, Kiyohiko ^e   Watanabe, Masayuki ^d   Yamakawa, Takahiro ^d   Miyata, Noboru ^d   Nakada, Akira ^a   Kubota, Hiroshi ^a   Ohmi, Tadahiro ^f  

^a KUMAMOTO UNIVERSITY   (Japan)

^b Kumamoto Technology and Industry Foundation   (Japan)

^c KUMAMOTO UNIVERSITY   (Japan)

^d TAIHEIYO CEMENT CORPORATION   (Japan)

^e AOYAMA GAKUIN UNIVERSITY   (Japan)

^f TOHOKU UNIVERSITY   (Japan)

Author keywords

Cylindrical actuator; Nonresonant ultrasonic motor; Piezoelectric actuator; Positioning; Precision stage; Resonant frequency; Vacuum

Indexed keywords

ELECTRIC POTENTIAL; FREQUENCIES; GAS EMISSIONS; PIEZOELECTRIC DEVICES; RELIABILITY; RESONANCE; VACUUM APPLICATIONS;

CYLINDRICAL ACTUATORS; NONRESONANT ULTRASONIC MOTOR; PIEZOELECTRIC ACTUATORS; POSITIONING; PRECISION STAGE; RESONANT FREQUENCY;

ACTUATORS;

EID: 22544445213     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3307     Document Type: Article

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