Speed up of Precision/Ultraprecision Positioning—Ball Screw vs. Linear Motor-

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 67, Issue 2, 2001, Pages 179-183

  Horiuchi, Osamu ^a  

^a NONE

Author keywords

ball screw; linear motor; lithography; machine tool; Positioning; table

Indexed keywords

EID: 30044445320     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.67.179     Document Type: Article

References (0)