Cylindrical micro ultrasonic motor utilizing bulk lead zirconate titanate (PZT)

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 5 B, 1999, Pages 3347-3350

  Morita, Takeshi ^a   Kurosawa, Minoru Kuribayashi ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Microactuator; Micromechanical system; PZT; Robot hand; Ultrasonic motor

Indexed keywords

ELECTRIC MOTORS; END EFFECTORS; LEAD COMPOUNDS; MICROACTUATORS; PIEZOELECTRICITY; STATORS; THIN FILMS; ULTRASONIC TRANSDUCERS;

LEAD ZIRCONATE TITANATE; ULTRASONIC MOTORS;

ULTRASONIC DEVICES;

EID: 0033321368     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.3347     Document Type: Article

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