Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage

2001 International Microprocesses and Nanotechnology Conference, MNC 2001

Volumn , Issue , 2001, Pages 252-253

  Egashira, Y ^a,b   Kosaka, K ^b,c   Takada, S ^b   Iwabuchi, T ^b   Kosaka, T ^b   Baba, T ^c   Harada, T ^a   Nagamoto, K ^a   Nakada, A ^a   Kubota, H ^a  

^a KUMAMOTO UNIVERSITY   (Japan)

^b Kumamoto University   (Japan)

^c Tokyo Technology Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MAGNETIC ACTUATORS; MOTORS; NANOTECHNOLOGY; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MOTORS; PIEZOELECTRICITY; ULTRASONIC EQUIPMENT; ULTRASONIC MACHINE TOOLS;

CONTROL SEQUENCES; HIGH-ACCURACY POSITIONING; MANUFACTURING DEVICES; NANOMETER POSITIONING; POSITIONING PERFORMANCE; SUBNANOMETER RESOLUTION; TRACKING ABILITY; ULTRASONIC MOTORS;

PIEZOELECTRIC ACTUATORS;

EID: 84960371437     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2001.984184     Document Type: Conference Paper

References (1)

1. Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation, H. J. Pahk et al. Int. J. Machine Tools & Manufacture, 41, (2001), 51-63