Cryogenic characterization and testing of magnetically-actuated microshutter arrays for the James Webb Space Telescope

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1594-1600

  King, T T ^a   Kletetschka, G ^a,b   Jah, M A ^a   Beamesderfer, M A ^a   Li, M J ^a   Wang, L L ^a,c   Moseley, S H ^a   Sparr, L M ^a   Jhabvala, M D ^a   Kutyrev, A S ^a,d   Silverberg, R F ^a   Rapchun, D ^a,e   Zheng, Y ^a,f   Schwinger, D S ^a   Voellmer, G M ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b CATHOLIC UNIVERSITY OF AMERICA   (United States)

^c NORTHROP GRUMMAN CORPORATION   (United States)

^d SCIENCE SYSTEMS AND APPLICATIONS INC   (United States)

^e GLOBAL SCIENCE AND TECHNOLOGY   (United States)

^f QSS GROUP INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHARACTERIZATION; CRYOGENICS; IMPACT TESTING; SILICON NITRIDE; SPACE FLIGHT;

ASTRONOMY MEASUREMENTS; LIFETESTING; LOGARITHMIC FAILURE; MICROSHUTTER ARRAYS (MSA);

TELESCOPES;

EID: 22544439706     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/031     Document Type: Article

References (10)

1. Stockman H S 1997 The Next Generation Space Telescope: Visiting a Time When Galaxies Were Young (Washington, DC: The Association of Universities for Research in Astronomy, Inc.)
2. Moseley S H, Fettig R K, Kutyrev A S, Li M J, Mott D B and Woodgate B E 2000 Status of the development of 128 ×128 microshutter array MOEMS and Miniaturized Systems, Proc. SPIE 4178 51-8
3. Kutyrev A S et al 2004 Programmable microshutter arrays for the JWST NIRSpec: optical performance IEEE J. Sel. Top. Quantum Electron. 10 652-61
4. Li M J et al 2001 Fabrication of microshutter arrays for space application Microelectronic and MEMS Technologies, Proc. SPIE 4407 295-303
5. Mott D B et al 2001 Magnetically actuated microshutter arrays Micro-Machining and Microfabrication, Proc. SPIE 4561 163-70
6. Garcia E J and Nichols C A 2000 Silicon micromirrors for the Next Generation Space Telescope American Astronomical Society, 196th Meeting (Rochester, NY) Bull. Am. Astron. Soc. 32 706
7. Kuhn J, Fettig R, Moseley S, Kutyrev A and Orloff J 2000 Fracture tests of etched components using a focused ion beam machine Proc. SPIE 4180 40-8
8. Li M J et al 2003 Microshutter arrays for near-infrared applications on the James Webb Space Telescope Proc. SPIE 4981 113-21
9. Li M J et al 2005 Microshutter arrays for the James Webb Space Telescope Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, Proc. SPIE 5650 9-16
10. Kletetschka G, Acuna M H, Kohout T, Wasilewski P J and Connerney J E P 2004 An empirical scaling law for acquisition of thermoremanent magnetization Earth Planet. Sci. Lett. 226 521-8