Programmable microshutter arrays for the JWST NIRSpec: Optical performance

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 652-660

  Kutyrev, Alexander S ^a   Arendt, Richard ^a   Moseley, S Harvey ^a   Boucarut, Ray A ^a   Hadjimichael, Theo ^a   Jhabvala, Murzy ^a   King, Todd ^a   Li, Mary J ^a   Loughlin, James ^a   Rapchun, David ^a   Schwinger, David Scott ^a   Silverberg, R F ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

Actuation; James Webb Space Telescope (JWST); Micro optics; Microelectromechanical systems (MEMS); Micromirror arrays; Microshutters; Planar structures; Programmable masks; Spatial light modulator

Indexed keywords

INFRARED SPECTROMETERS; LIGHT MODULATION; LIGHT TRANSMISSION; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; SILICON NITRIDE; SPACE TELESCOPES;

ACTUATION; JAMES WEBB SPACE TELESCOPE (JWST); MICROMIRROR ARRAYS; MICROSHUTTERS; PROGRAMMABLE MASKS;

OPTICAL SHUTTERS;

EID: 4344591785     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.830614     Document Type: Article

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