Magnetically actuated microshutter arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 163-170

  Mott, D Brent ^a   Aslam, S ^a,b   Blumenstock, K A ^a   Fettig, R K ^a,b   Franz, D ^a,b   Kutyrev, A S ^a,b   Li, M J ^a   Monroy, C J ^a,b   Moseley, S H ^a   Schwinger, D S ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b RAYTHEON COMPANY   (United States)

Author keywords

DRIE; Magnetic actuation; Microshutter; Silicon nitride; Transmissive mask

Indexed keywords

ANISOTROPY; CRYOGENICS; MAGNETIC MATERIALS; MICROELECTROMECHANICAL DEVICES; SILICON NITRIDE; TELESCOPES;

MICROSHUTTER ARRAYS;

MASKS;

EID: 0037860258     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443109     Document Type: Article

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