Fabrication of microshutter arrays for space application

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 295-303

  Li, M J ^a   Aslam, I S ^a   Ewin, A ^a   Fettig, R K ^a   Franz, D ^a   Kotecki, C ^a   Kutyrev, A S ^a   Moseley, S H ^a   Monroy, C ^a   Mott, D B ^a   Zheng, Y ^a  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

DRIE; MEMS; Micro optics; Microshutter; Near infrared

Indexed keywords

CMOS INTEGRATED CIRCUITS; LIGHT TRANSMISSION; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; OPTICAL SHUTTERS; REACTIVE ION ETCHING; SILICON NITRIDE; SPACE APPLICATIONS; STRESS CONCENTRATION;

MICROSHUTTER ARRAYS;

TELESCOPES;

EID: 17944368501     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425314     Document Type: Article

References (7)

1. A multi-object spectrometer using micro mirror arrays
2. Silicon micromirrors for the next generation space telescope
3. Programmabl 2 dimensional microshutter arrays
4. Fracture tests of etched components using a focused Ion Beam machine
5. Some aspects on the mechanical analysis of micro-shutters
6. Status of the development of 128×128 microshutter array