Microshutter arrays for near-infrared applications on the James Webb Space Telescope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 113-121

  Li, M J ^a   Bier, A ^a,b   Fettig, R K ^a,c   Franz, D ^a,c   Hu, R ^a,c   King, T ^a   Kutyrev, A S ^a,c   Lynch, B A ^a,c   Moseley, S H ^a   Mott, D B ^a   Rapchun, D ^a,c   Silverberg, R F ^a   Smith, W ^a,d   Wang, L ^a,d   Zheng, Yun ^a,e   Zinke, C ^a,e  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b GLOBAL SCIENCE AND TECHNOLOGY   (United States)

^c RAYTHEON COMPANY   (United States)

^d NORTHROP GRUMMAN CORPORATION   (United States)

^e QSS GROUP INC   (United States)

Author keywords

DRIE; Magnetic actuation; MEMS; Micro optics; Microshutter; Near infrared; RIE; Space telescope

Indexed keywords

ANISOTROPY; INFRARED RADIATION; MICROACTUATORS; MICROOPTICS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SPACE TELESCOPES; STRESS CONCENTRATION;

MICROSHUTTER ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038397482     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476285     Document Type: Conference Paper

References (8)

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