ZrO2-coated SiC nanowires prepared by plasma-enhanced atomic layer chemical vapor deposition

Surface Review and Letters

Volumn 12, Issue 2, 2005, Pages 215-219

  Tak, Youngjo ^a   Yong, Kijung ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Core shell nanowire; Nanowires; Plasma enhanced ALCVD; SiC; ZrO2

Indexed keywords

ANNEALING; COATINGS; HYDROGEN; LASER ABLATION; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; WIRE; ZIRCONIA;

CORE-SHELL NANOWIRES; NANOWIRES; PLASMA-ENHANCED ALCVD; SIC; ZRO2;

SILICON CARBIDE;

EID: 22344441113     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X05006962     Document Type: Article

References (11)

1. T. Suntola, Thin Solid Films 216 (1992) 84.
2. K. Yong and J. Jeong, Korean J. Chem. Eng. 19 (2002) 451.
3. S. M. George, A. W. Ott and J. W. Klaus, J. Phys. Chem. 100 (1996) 13121.
4. S. Haukka and T. Suntola, Interface Sci. 5 (1997) 119.
5. J. Kuo and J. Rogers Jr., Surf. Sci. 453 (2000) 119.
6. J. S. Park, M. J. Lee, C. S. Lee and S. W. Kang, Electrochem. Solid State Lett. 4 (2001) C17.
7. C. W. Jeong, J. S. Lee and S. K. Joo, Jpn. J. Appl. Phys. 40 (2001) 285.
8. G. W. Meng, L. D. Zhang, C. M. Mo, S. Y. Zhang, Y. Qin, S. P. Feng and H. J. Li, Solid State Commun. 106 (1998) 215.
9. X. T. Zhou, N. Wang, H. L. Lai, H. Y. Peng, I. Bello, N. B. Wong, C. S. Lee and S. T. Lee, Appl. Phys. Lett. 74 (1999) 3942.
10. B. T. Park and K. Yong, Nanotechnology 15 (2004) S365.
11. B. Park, Y. Ryu and K. Yong, Surf. Rev. Lett. 11 (2004) 373.