Advanced Materials Processing by Adsorption Control

Interface Science

Volumn 5, Issue 2-3, 1997, Pages 119-128

  Haukka, Suvi ^a   Suntola, Tuomo ^a  

^a Microchemistry Ltd   (Finland)

Author keywords

Atomic layer epitaxy (ale); Atomic layer level; Catalyst preparation; Chemisorption; Gas solid reactions; High surface area materials; Saturation

Indexed keywords

ADSORPTION; CATALYSTS; CHEMICAL REACTIONS; CHEMISORPTION; CONTROL; DEPOSITION; SATURATION (MATERIALS COMPOSITION); SURFACE STRUCTURE;

ATOMIC LAYER EPITAXY; ATOMIC LAYER LEVEL; CATALYST PREPARATION; GAS SOLID REACTION; HIGH SURFACE AREA MATERIAL;

EPITAXIAL GROWTH;

EID: 0031224604     PISSN: 09277056     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1008601024870     Document Type: Article

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