Development of behavioural models for mechanically loaded microcantilevers and beams

Analog Integrated Circuits and Signal Processing

Volumn 44, Issue 2, 2005, Pages 109-118

  Lishchynska, Maryna ^a   Cordero, Nicolas ^a   Slattery, Orla ^a,b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b PATENTDfMM ^*

Author keywords

Behavioural model; Mechanical load; MEMS

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; STRUCTURAL LOADS;

BEHAVIORAL MODEL; MACROENGINEERING; MACROSTRUCTURES; MICRODEVICES;

CANTILEVER BEAMS;

EID: 22144456069     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10470-005-2590-1     Document Type: Conference Paper

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