Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 324-334

  Kim, Joohan ^a   Berberoglu, Halil ^a   Xu, Xianfan ^a  

^a Purdue University   (United States)

Author keywords

Excimer laser; Femtosecond laser; FOTURAN; Photoetchable glass ceramics

Indexed keywords

EXCIMER LASERS; LASER APPLICATIONS; LIGHT ABSORPTION; MICROMACHINING; MICROSTRUCTURE; THREE DIMENSIONAL;

FEMTOSECOND LASER; LASER FABRICATION;

GLASS CERAMICS;

EID: 0344119570     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479239     Document Type: Conference Paper

References (7)

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