Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4978, Issue , 2003, Pages 169-179

  Meunier, M ^a   Fisette, B ^a   Houle, A ^a   Kabashin, A V ^a   Broude, S V ^b   Miller, P ^b  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b Resonetics Incorporated   (United States)

Author keywords

Femtosecond laser ablation; Laser microfabrication; Silicon; Stainless steel

Indexed keywords

DIELECTRIC MATERIALS; MICROMACHINING; SILICON; STAINLESS STEEL; THERMAL DIFFUSION; VACUUM FURNACES;

PARASITIC ABLATION;

LASER ABLATION;

EID: 0141568001     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478595     Document Type: Conference Paper

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