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Volumn 5717, Issue , 2005, Pages 134-141

Fabrication of out-of-plane refractive concave and convex microlens arrays

Author keywords

Concave; Convex; Fiber coupler; Free space optics; Integrated optical systems; Out of plane; Pre aligned; Refractive microlens array; SU 8; UV lithography

Indexed keywords

CONCAVE; CONVEX; FIBER COUPLER; FREE-SPACE OPTICS; INTEGRATED OPTICAL SYSTEMS; OUT-OF-PLANE; PRE-ALIGNED; REFRACTIVE MICROLENS ARRAY; SU-8; UV LITHOGRAPHY;

EID: 21844445825     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601832     Document Type: Conference Paper
Times cited : (4)

References (10)
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    • October
    • C.R. King; L.Y. Lin; M.C. Wu; "Out-of-Plane Refractive Microlens Fabricated by Surface Micromachining," IEEE Photonics Technology Letters, Vol. 8, No. 10, pp 1349-1351, October 1996.
    • (1996) IEEE Photonics Technology Letters , vol.8 , Issue.10 , pp. 1349-1351
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  • 2
    • 0031268305 scopus 로고    scopus 로고
    • Micromachining for optical and optoelectronic systems
    • November
    • M. C. Wu, "Micromachining for Optical and Optoelectronic Systems," Proceeding IEEE, Vol. 85, No. 11, pp. 1833-1856, November 1997.
    • (1997) Proceeding IEEE , vol.85 , Issue.11 , pp. 1833-1856
    • Wu, M.C.1
  • 4
    • 0033361750 scopus 로고    scopus 로고
    • Assembly of micro optical components using magnetic actuation
    • Yong W. Yi, Chang Liu, "Assembly of Micro Optical Components Using Magnetic Actuation," Sensors and Actuators A, Vol.78, 1999, P205-211.
    • (1999) Sensors and Actuators A , vol.78 , pp. 205-211
    • Yi, Y.W.1    Liu, C.2
  • 5
    • 0033537535 scopus 로고    scopus 로고
    • 3D microfabrication by combing microstereolithography and thick resist UV lithography
    • Mar
    • A. Bertsch, H. Lorenz, P. Renaud, "3D microfabrication by combing microstereolithography and thick resist UV lithography," Sensor and Actuators, A: Physical, v 73, n 1-2, Mar, 1999, p 14-23
    • (1999) Sensor and Actuators, A: Physical , vol.73 , Issue.1-2 , pp. 14-23
    • Bertsch, A.1    Lorenz, H.2    Renaud, P.3
  • 8
    • 2142679304 scopus 로고    scopus 로고
    • Fabrication of out-of-plane SU-8 refractive microlens using directly lithography method
    • Jan San Jose, CA
    • R. Yang, W. Wang, "Fabrication of out-of-plane SU-8 refractive microlens using directly lithography method," SPIE Photonics West, Jan 2004 San Jose, CA
    • (2004) SPIE Photonics West
    • Yang, R.1    Wang, W.2
  • 9
    • 2942674821 scopus 로고    scopus 로고
    • Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8
    • June 15
    • R. Yang, W. Wang, "Out-of-plane Polymer Refractive Microlens Fabricated Based on Direct Lithography of SU-8," Sensor and Actuators A: Physical, Vol. 113, No.1, P71-77, June 15, 2004
    • (2004) Sensor and Actuators A: Physical , vol.113 , Issue.1 , pp. 71-77
    • Yang, R.1    Wang, W.2
  • 10
    • 12844257537 scopus 로고    scopus 로고
    • Numerical and experimental study on an out-of-plane pre-aligned refractive microlens fabricated using UV lithography method
    • December, in press
    • R. Yang, W. Wang, "Numerical and Experimental Study on an Out-of-Plane Pre-aligned Refractive Microlens Fabricated Using UV Lithography Method," Optical Engineering, Vol. 43, No. 12, December 2004, in press.
    • (2004) Optical Engineering , vol.43 , Issue.12
    • Yang, R.1    Wang, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.