-
3
-
-
0026983524
-
Residual-stress compensation in clamped-clamped micromachined plates
-
Anaheim, CA, Nov.
-
R.P. Ried, E.S. Kim, D.M. Hong, R.S. Muller, Residual-stress compensation in clamped-clamped micromachined plates, Micromech. Syst., ASME Winter Annual Mtg., Anaheim, CA, Nov., 1992, pp. 23-32.
-
(1992)
Micromech. Syst., ASME Winter Annual Mtg.
, pp. 23-32
-
-
Ried, R.P.1
Kim, E.S.2
Hong, D.M.3
Muller, R.S.4
-
4
-
-
0030379037
-
Piezoelectric cantilever microphone and microspeaker
-
S.S. Lee, R.P. Ried, R.M. White, Piezoelectric cantilever microphone and microspeaker, J. Microelectromech. Syst. 5 (4) (1996) 238-242.
-
(1996)
J. Microelectromech. Syst.
, vol.5
, Issue.4
, pp. 238-242
-
-
Lee, S.S.1
Ried, R.P.2
White, R.M.3
-
5
-
-
84925175290
-
The resonant gate transistor
-
H.C. Nathanson, W.E. Newell, R.A. Wickstrom, J.R. Davis Jr., The resonant gate transistor, IEEE Trans. Electron Dev. ED-14 (3) (1967) 117-133.
-
(1967)
IEEE Trans. Electron Dev.
, vol.ED-14
, Issue.3
, pp. 117-133
-
-
Nathanson, H.C.1
Newell, W.E.2
Wickstrom, R.A.3
Davis J.R., Jr.4
-
6
-
-
0024101733
-
Sensors with digital or frequency output
-
S. Middelhoek, P.J. French, J.H. Huijsing, W.J. Lian, Sensors with digital or frequency output, Sensors and Actuators A 15 (1988) 119-133.
-
(1988)
Sensors and Actuators A
, vol.15
, pp. 119-133
-
-
Middelhoek, S.1
French, P.J.2
Huijsing, J.H.3
Lian, W.J.4
-
7
-
-
0030103510
-
Self-excited piezoelectric cantilever oscillator
-
S.S. Lee, R.M. White, Self-excited piezoelectric cantilever oscillator, Sensors and Actuators A 52 (1996) 41-45.
-
(1996)
Sensors and Actuators A
, vol.52
, pp. 41-45
-
-
Lee, S.S.1
White, R.M.2
-
8
-
-
0025698085
-
Thin-film Zno as micromechanical actuator at low frequencies
-
F.R. Blom, D.J. Yntema, F.C.M. van De Pol, M. Elwenspoek, J.H.J. Fluitman, Th.J.A. Popma, Thin-film ZnO as micromechanical actuator at low frequencies, Sensors and Actuators A 21-23 (1990) 226-228.
-
(1990)
Sensors and Actuators A
, vol.21-23
, pp. 226-228
-
-
Blom, F.R.1
Yntema, D.J.2
Van De Pol, F.C.M.3
Elwenspoek, M.4
Fluitman, J.H.J.5
Popma, T.J.A.6
-
9
-
-
0002645964
-
Stress and microstructure in phosphorous doped polycrystalline silicon
-
P. Krulevitch, G.C. Johnson, R.T. Howe, Stress and microstructure in phosphorous doped polycrystalline silicon, Mater. Res. Soc. Symp. Proc. 276 (1991) 79-84.
-
(1991)
Mater. Res. Soc. Symp. Proc.
, vol.276
, pp. 79-84
-
-
Krulevitch, P.1
Johnson, G.C.2
Howe, R.T.3
-
10
-
-
0019033186
-
Postdeposition annealing behavior of RF sputtered Zno films
-
R.J. Lad, P.D. Funkenbusch, C.R. Aita, Postdeposition annealing behavior of RF sputtered ZnO films, J. Vac. Sci. Technol. 17 (4) (1980) 808-811.
-
(1980)
J. Vac. Sci. Technol.
, vol.17
, Issue.4
, pp. 808-811
-
-
Lad, R.J.1
Funkenbusch, P.D.2
Aita, C.R.3
-
11
-
-
34247495690
-
A resonant-gate silicon surface transistor with high-Q band-pass properties
-
H.C. Nathanson, R.A. Wickstrom, A resonant-gate silicon surface transistor with high-Q band-pass properties, Appl. Phys. Lett. 7 (4) (1965) 84-86.
-
(1965)
Appl. Phys. Lett.
, vol.7
, Issue.4
, pp. 84-86
-
-
Nathanson, H.C.1
Wickstrom, R.A.2
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