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Volumn 71, Issue 1-2, 1998, Pages 153-157

Piezoelectric cantilever voltage-to-frequency converter

Author keywords

Cantilever; Microspeaker; Voltage to frequency converter; Zinc oxide

Indexed keywords


EID: 0010135330     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00157-5     Document Type: Article
Times cited : (23)

References (11)
  • 4
    • 0030379037 scopus 로고    scopus 로고
    • Piezoelectric cantilever microphone and microspeaker
    • S.S. Lee, R.P. Ried, R.M. White, Piezoelectric cantilever microphone and microspeaker, J. Microelectromech. Syst. 5 (4) (1996) 238-242.
    • (1996) J. Microelectromech. Syst. , vol.5 , Issue.4 , pp. 238-242
    • Lee, S.S.1    Ried, R.P.2    White, R.M.3
  • 7
    • 0030103510 scopus 로고    scopus 로고
    • Self-excited piezoelectric cantilever oscillator
    • S.S. Lee, R.M. White, Self-excited piezoelectric cantilever oscillator, Sensors and Actuators A 52 (1996) 41-45.
    • (1996) Sensors and Actuators A , vol.52 , pp. 41-45
    • Lee, S.S.1    White, R.M.2
  • 9
    • 0002645964 scopus 로고
    • Stress and microstructure in phosphorous doped polycrystalline silicon
    • P. Krulevitch, G.C. Johnson, R.T. Howe, Stress and microstructure in phosphorous doped polycrystalline silicon, Mater. Res. Soc. Symp. Proc. 276 (1991) 79-84.
    • (1991) Mater. Res. Soc. Symp. Proc. , vol.276 , pp. 79-84
    • Krulevitch, P.1    Johnson, G.C.2    Howe, R.T.3
  • 10
    • 0019033186 scopus 로고
    • Postdeposition annealing behavior of RF sputtered Zno films
    • R.J. Lad, P.D. Funkenbusch, C.R. Aita, Postdeposition annealing behavior of RF sputtered ZnO films, J. Vac. Sci. Technol. 17 (4) (1980) 808-811.
    • (1980) J. Vac. Sci. Technol. , vol.17 , Issue.4 , pp. 808-811
    • Lad, R.J.1    Funkenbusch, P.D.2    Aita, C.R.3
  • 11
    • 34247495690 scopus 로고
    • A resonant-gate silicon surface transistor with high-Q band-pass properties
    • H.C. Nathanson, R.A. Wickstrom, A resonant-gate silicon surface transistor with high-Q band-pass properties, Appl. Phys. Lett. 7 (4) (1965) 84-86.
    • (1965) Appl. Phys. Lett. , vol.7 , Issue.4 , pp. 84-86
    • Nathanson, H.C.1    Wickstrom, R.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.