Thermal stability of metal-doped diamond-like carbon fabricated by dual plasma deposition

Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1489-1493

  Fu, Ricky K Y ^a   Mei, Y F ^a   Fu, M Y ^a   Liu, X Y ^a,b   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Cathodic arc; Diamond like carbon; Metal doping; Plasma deposition; Thermal stability

Indexed keywords

ANNEALING; DOPING (ADDITIVES); ELECTRIC ARCS; PLASMA THEORY; RAMAN SPECTROSCOPY; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CATHODIC ARCS; FIELD EMISSION; METAL DOPING; PLASMA DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 21344443502     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.03.006     Document Type: Article

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