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Volumn 86, Issue 6, 2005, Pages 1-3

Nanometer-scale gaps between metallic electrodes fabricated using a statistical alignment technique

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTANCE; ELECTRON BEAM LITHOGRAPHY; EVAPORATION; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; STATISTICAL METHODS;

EID: 21044435677     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1862342     Document Type: Article
Times cited : (20)

References (14)
  • 13
    • 21044454058 scopus 로고    scopus 로고
    • An Example of a Current EBL Tool Is the Leica VB6 UHR EWF
    • An example of a current EBL tool is the Leica VB6 UHR EWF.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.