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Volumn 81, Issue 4, 2002, Pages 730-732
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Fabrication of nanoscale gaps in integrated circuits
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
GAP SIZE;
IDEAL SYSTEMS;
METAL CLUSTER;
NANO-SIZE;
NANOMETER SIZE;
NANOSCALE GAPS;
QUANTUM DEVICE;
QUANTUM PHENOMENA;
SMALL OBJECTS;
SUBNANOMETER PRECISION;
PHOTOLITHOGRAPHY;
NANOPARTICLES;
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EID: 79956003902
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1495080 Document Type: Article |
Times cited : (62)
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References (14)
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