Quantitative measurement of sheet resistance by evanescent microwave probe

Applied Physics Letters

Volumn 86, Issue 15, 2005, Pages 1-3

  Wang, Zhengyu ^a   Kelly, Michael A ^a   Shen, Zhi Xun ^a   Shao, Lin ^b   Chu, Wei Kan ^b   Edwards, Hal ^c  

^a STANFORD UNIVERSITY   (United States)

^b University of Houston   (United States)

^c TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVANESCENT MICROWAVE PROBE (EMP); MICROWAVE FREQUENCIES; SCANNING PROBE TOOLS; SHEET RESISTANCE;

CAPACITANCE; CHEMICAL ANALYSIS; DIELECTRIC FILMS; INDIUM COMPOUNDS; METALLIC FILMS; MICROWAVES; NATURAL FREQUENCIES; PROBES; TIN COMPOUNDS;

ELECTRIC RESISTANCE;

EID: 20844436745     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1891296     Document Type: Article

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