Nanocomposite hard coatings: Deposition issues and validation of their mechanical properties

Advanced Engineering Materials

Volumn 7, Issue 5, 2005, Pages 318-322

  Schwaller, Patrick ^a   Haug, Franz Josef ^a   Michler, Johann ^a   Patscheider, Jörg ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; OXIDATION; PHYSICAL VAPOR DEPOSITION; SILICON NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

CONVENTIONAL COATINGS; NANOCOMPOSITE COATINGS; NANOINDENTATION; TIP CALIBRATION;

COATINGS;

EID: 20644440198     PISSN: 14381656     EISSN: None     Source Type: Journal    
DOI: 10.1002/adem.200500045     Document Type: Article

References (24)

1. X. Chu, S. A. Barnett, J. Appl Phys. 1995, 77, 4403.
2. H. Holleck, V. Schier, Surf. Coat. Technol. 1995, 76, 328.
3. Shizhi Li, Yulong Shi, Hongrui Peng, Plasma Chem. Plasma Process. 1992, 22, 287.
4. S. Veprek, S. Reiprich, Thin Solid Films 1995, 268, 64.
5. M. Diserens, J. Patscheider, F. Lévy, Surf. Coat. Technol. 1998, 108-103, 241.
6. S. Veprek, S. Reiprich, Shizhi Li, Appl. Phys. Lett. 1995, 66, 2640.
7. J. Patscheider, T. Zehnder, M. Diserens, Surf. Coat. Technol. 2001, 146-147, 201.
8. T. Zehnder, J. Patscheider, Surf. Coat. Technol. 2000, 133-134, 138.
9. T. Zehnder, J. Patscheider, P. Schwaller, F, Munnik, S. Mikhailov, J. Appl. Phys. 2004, 95, 4327.
10. P. H. Mayrhofer, H. Willmann, C. Mitterer, Thin Solid Films 2003, 440, 174.
11. P. J. Martin A. Bendavid, Surf. Coat. Technol 2003, 163/164, 245.
12. F.-J. Haug, P. Schwaller, F. Wloka, J. Patscheider, A. Karimi, M. Tobler, J. Vac. Sci. Technol. A 2004, 22, 1229.
13. P. Holubar, M. Jilek, M. Sima, Surf. Coat. Technol. 2000, 133-234, 145.
14. S. Chen, L. Liu, T. Wang, Acta Mater. 2004, 52, 1089.
15. B. D. Fabes, W. C. Oliver, R. A. McKee, F. J. Walker, J. Mater. Res. 1992, 7, 3056.
16. R. Kouitat-Njiwa, J. von Stebut, Int. J. Mech. Sci. 2003, 45/2, 317.
17. A. K. Bhattacharya, W. D. Nix, Int. J. Solids Structures 1998, 24, 1287.
18. R. B. King, Int. J. Solids Structures 1987, 23, 1657.
19. B. Jönsson, S. Hogmark, Thin Solid Films 1984, 114, 257.
20. W. C. Oliver, G. M. Pharr, J. Mater. Res. 2004, 19, 3.
21. C. Fischer-Cripps, Nanoindentation, Springer, New York 2002.
22. K. W. Lee, Y.-W. Chung, C. Y. Chan, I. Bello, S. T. Lee, A. Karimi, J. Patscheider, M. P. Delplancke-Ogletree, D. Yang, B. Boyce, T. Buchheit, Surf. Coat. Technol. 2003, 168, 57.
23. M Diserens, J. Patscheider, F. Lev́y, Surf. Coat. Technol. 1999, 120-121, 158.
24. S. Veprek, H.-D. Männling, A. Niederhofer, D. Ma, S. Mukherjee, J. Vac. Sci. Technol. B 2004, 22(2), L5.