Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates

International Journal of Solids and Structures

Volumn 24, Issue 12, 1988, Pages 1287-1298

  Bhattacharya, A K ^a   Nix, W D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 45549118580     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/0020-7683(88)90091-1     Document Type: Article

References (7)

1. Finite element simulation of indentation experiments
2. Plastic properties of thin films on substrates as measured by sub-micron indentation hardness and substrate curvature techniques
3. A method for interpreting the data from depth-sensing indentation instruments
4. The correlation of indentation experiments
5. Elastic analysis of some punch problems for a layered medium
6. Hardness measurements at penetration depths as small as 20 nm.