High-resolution electron beam lithography and DNA nano-patterning for molecular QCA

IEEE Transactions on Nanotechnology

Volumn 4, Issue 3, 2005, Pages 312-316

  Hu, Wenchuang ^a   Sarveswaran, Koshala ^b   Lieberman, Marya ^b   Bernstein, Gary H ^a  

^a University of Notre Dame   (United States)

^b UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

Au nanoparticles; DNA tiling; Electron beam lithography (EBL); Liftoff, metal grains; Molecular electronics; Nanofabrication; Quantum dot cellular automata (QCA)

Indexed keywords

AUTOMATA THEORY; DNA; ELECTRON BEAMS; LITHOGRAPHY; MOLECULES; NANOSTRUCTURED MATERIALS; POLYMETHYL METHACRYLATES; THERMAL EFFECTS;

AU NANOPARTICLES; DNA TILING; ELECTRON BEAM LITHOGRAPHY (EBL); LITOFF; METAL GRAINS; MOLECULAR ELECTRONICS; QUANTUM DOT CELLULAR AUTOMATA (QCA);

SEMICONDUCTOR QUANTUM DOTS;

EID: 20344395877     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2005.847034     Document Type: Conference Paper

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