Molecular-dynamics simulation of germanium film growth by cluster deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 234, Issue 4, 2005, Pages 487-493

  Zhang, L ^a   Feng, J Y ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Cluster deposition; Ge films; Molecular dynamics simulation; Stillinger Weber potential; Stress

Indexed keywords

AMORPHOUS MATERIALS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; DEPOSITION; EQUATIONS OF MOTION; FILM GROWTH; METALLIC FILMS; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS; SILICON; STRESS CONCENTRATION; SUBSTRATES;

CLUSTER DEPOSITION; GE FILMS; MOLECULAR-DYNAMICS SIMULATION; STILLINGER-WEBER POTENTIAL; STRESS;

GERMANIUM;

EID: 20344394132     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.001     Document Type: Article

References (21)

1. J.F. Liu, D.D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D.T. Danielson, J. Michel, and L.C. Kimerling Appl. Phys. Lett. 84 2004 660
2. H.C. Luan, D.R. Lim, K.K. Lee, K.M. Chen, J.G. Sandland, K. Wada, and L.C. Kimerling Appl. Phys. Lett. 75 1999 2909
3. F.M. Ross, J. Tersoff, and R.M. Tromp Phys. Rev. Lett. 80 1998 984
4. A. Vailionis, B. Cho, G. Glass, P. Desjardins, D.G. Cahill, and J.E. Greene Phys. Rev. Lett. 85 2000 3672
5. Y.-W. Mo, D.E. Savage, B.S. Swartzentruber, and M.G. Lagally Phys. Rev. Lett. 65 1990 1020
6. P. Sutter, I. Schick, W. Ernst, and E. Sutter Phys. Rev. Lett. 91 2003 176102
7. G. Wedler, J. Walz, T. Hesjedal, E. Chilla, and R. Koch Phys. Rev. Lett. 80 1998 2382
8. J.A. Floro, E. Chason, L.B. Freund, R.D. Twesten, R.Q. Hwang, and G.A. Lucadamo Phys. Rev. B 59 1999 1990
9. S. Banerjee, S. Nozaki, and H. Morisaki J. Appl. Phys. 91 2002 4307
10. S. Sato, S. Nozaki, H. Morisaki, and M. Iwase Appl. Phys. Lett. 66 1995 3176
11. T. Takagi, I. Yamada, M. Kunori, S. Kobiyama, in: Proc. 2nd Int. Conf. Ion Sources, Vienna, 1972, p. 790.
12. D.W. Heermann Computer simulation methods 1986 Springer Berlin/Heidelberg
13. H.P. Cheng J. Chem. Phys. 111 1999 7583
14. F.H. Stillinger, and T.A. Weber Phys. Rev. B 31 1985 5262
15. M. Laradji, D.P. Landau, and B. Dünweg Phys. Rev. B 51 1995 4894
16. H. Balamane, T. Halicioglu, and W.A. Tiller Phys. Rev. B 46 1992 2250
17. M. Ishimaru, M. Yamaguchi, and Y. Hirotsu Phys. Rev. B 68 2003 235207
18. I. Kwon, R. Biswas, G.S. Grest, and C.M. Soukoulis Phys. Rev. B 41 1990 3678
19. G.H. Gilmer, C. Roland, D. Stock, M. Jaraiz, and T. Diaz de la Rubia Mater. Sci. Eng. B 37 1996 1
20. H. Hensel, and H.M. Urbassek Phys. Rev. B 58 1998 2050
21. U. Landman, W.D. Luedtke, M.W. Ribarsky, R.N. Barnett, and C.L. Cleveland Rev. B 37 1988 4637