Citric acid as a complexing agent in CMP of copper investigation of surface reactions using impedance spectroscopy

Journal of the Electrochemical Society

Volumn 152, Issue 5, 2005, Pages

  Gorantla, V R K ^a,b   Assiongbon, K A ^a   Babu, S V ^a,b   Roy, D ^a  

^a CLARKSON UNIVERSITY   (United States)

^b Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBOXYLIC ACIDS; CHEMICAL ANALYSIS; COPPER; ELECTRODES; FREQUENCY DOMAIN ANALYSIS; POLARIZATION; SPECTRUM ANALYSIS; SURFACE CHEMISTRY;

CHEMICAL MECHANICAL PLANARIZATION (CMP); COMPLEXING AGENTS; IMPEDENCE SPECTROSCOPY; SURFACE OXIDES;

SURFACE REACTIONS;

EID: 20344368565     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1890786     Document Type: Article

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