Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts

Precision Engineering

Volumn 29, Issue 3, 2005, Pages 324-335

  Smith, Philip T ^a   Vallance, R Ryan ^b   Marsh, Eric R ^c  

^a UNIVERSITY OF KENTUCKY   (United States)

^b GEORGE WASHINGTON UNIVERSITY   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Artifact; Cylinder; Displacement sensors; Metrology

Indexed keywords

CAPACITANCE; CYLINDERS (SHAPES); DATA PROCESSING; ERROR CORRECTION; MOTION CONTROL; SENSITIVITY ANALYSIS; SENSORS;

ARTIFACT; CYLINDER; DISPLACEMENT SENSORS;

MEASUREMENT THEORY;

EID: 19944412153     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2004.11.010     Document Type: Article

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