Linearization of inverse-capacitance-based displacement transducers

Measurement Science and Technology

Volumn 12, Issue 1, 2001, Pages 77-81

  Lányi, Štefan ^a   Hruškovic, Miloslav ^b  

^a INSTITUTE OF PHYSICS   (Slovakia)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

Capacitive sensor; Displacement transducer; Linearization

Indexed keywords

CAPACITANCE; CAPACITIVE SENSORS; LINEARIZATION;

CLOSED-LOOP CONTROL; DISPLACEMENT TRANSDUCER; FINE TUNING; INVERSE CAPACITANCE; OPTICAL INTERFEROMETRY; PROBE POSITION; SCALED-UP;

TRANSDUCERS;

EID: 14744301191     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/12/1/310     Document Type: Article

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