Effects of spherical targets on capacitive displacement measurements

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 822-829

  Ryan Vallance, R ^a   Marsh, Eric R ^b   Smith, Philip T ^c  

^a GEORGE WASHINGTON UNIVERSITY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c UNIVERSITY OF KENTUCKY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRODES; ERROR ANALYSIS; FINITE ELEMENT METHOD; PERMITTIVITY; SENSITIVITY ANALYSIS; STANDARDS;

CAPACITIVE DISPLACEMENT; HYPERBOLIC RELATIONS; SENSING ELECTRODES; WORKPIECE METROLOGY;

SENSORS;

EID: 14744288759     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1813476     Document Type: Article

References (41)

1. ANSI/ASME B5.54, 1992, Methods for Performance Evaluation of Computer Numerically Controlled Machining Centers, ASME, New York.
2. ANSI/ASME B5.57, 2000, Methods for Performance Evaluation of Computer Numerically Controlled Lathes and Turning Centers, ASME, New York.
3. ANSI/ASME B89.3.4M, 1985, Axes of Rotation-Methods for Specifying and Testing, ASME, New York.
4. Grejda, R. D., 2002, "Use and Calibration of Ultra Precision Axes of Rotation with Nanometer Level of Metrology," Ph.D. thesis, Penn State University, State College, PA.
5. Morgan, V. T., and Brown, D. E., 1969, "A Differential-Capacitance Transducer for Measuring Small Displacements," J. Phys. E, 2, pp. 793-795.
6. Jones, R. V., and Richards, J. C. S., 1973, "The Design and Some Applications of Sensitive Capacitance Micrometers," J. Phys. E, 6, pp. 589-600.
7. Stacey, F. D., Rynn, J. M. W., Little, E. C., and Croskell, C., 1969, "Displacement and Tilt Transducers of 140 dB Range," J. Phys. E, 2, pp. 945-949.
8. Schofield, J. W., 1972, "A Linear Capacitance Micrometer," J. Phys. E, 5, pp. 822-825.
9. Sydenham, P. H., 1972, "Microdisplacement Transducers," J. Phys. E, 5, pp. 721-733.
10. Rigden, J. D., 1977, "A Capacitive Bore Gauge," J. Phys. E, 10, pp. 1276-1278.
11. Hicks, T. R., Reay, N. K. and Atherton, P. D., 1984, "The Application of Capacitance Micrometry to the Control of Fabry-Perot Etalons," J. Phys. E, 17, pp. 49-55.
12. Wolfendale, P. C. F., 1968, "Capacitive Displacement Transducers with High Accuracy and Resolution," J. Phys. E, 2, pp. 817-818.
13. de Jong, G. W., and Meijer, G. C. M., 1997, "An Efficient Retrieving Algorithm for Accurate Capacitive Position Sensors," Sens. Actuators, A, 58, pp. 75-84.
14. Kolb, P. W., Decca, R. S. and Drew, H. D., 1988, "Capacitive Sensor for Micropositioning in Two Dimensions," Rev. Sci. Instrum., 69(1), pp. 310-312.
15. Hague, B., and Foord, T. R., 1971, Alternating Current Bridge Methods, Pittman, London.
16. Hugill, A. L., 1982, "Displacement Transducers Based on Reactive Sensors in Transformer Ratio Bridges," J. Phys. E, 15, pp. 597-606.
17. Dratler, J., 1977, "Inexpensive Linear Displacement Transducer Using a Low Power Lock-In Amplifier," Rev. Sci. Instrum., 48(3), pp. 327-335.
18. Huang, S. M., Stott, A. L., Green, R. G., and Beck, M. S., 1988, "Electronic Transducers for Industrial Measurement of Low Value Capacitances," J. Phys. E, 21, pp. 242-250.
19. Ashrafi, A., and Golnabi, H., 1999, "A High Precision Method for Measuring Very Small Capacitance Changes," Rev. Sci. Instrum., 70(8), pp. 3483-3487.
20. Lanyi, S., and Hrukovic, M., 2001, "Linearization of Inverse-Capacitance-Based Displacement Transducers," Meas. Sci. Technol., 12, pp. 77-81.
21. Fritsch, K., 1987, "Linear Capacitive Displacement Sensor With Frequency Readout," Rev. Sci. Instrum., 58(5), pp. 861-863.
22. Richards, J. C. S., 1976, "Linear Capacitance Proximity Gauges with High Resolution," J. Phys. E, 9, 639-646.
23. Maxwell, J. C., 1873, A Treatise on Electricity and Magnetism, Vol. 1, Oxford Univ. Press, New York.
24. Heerens, W. C., and Vermeulen, F. C., 1975, "Capacitance of Kelvin Guard-Ring Capacitors with Modified Edge Geometry," J. Appl. Phys., 46, pp. 2486-2490.
25. Heerens, W. C., 1976, "The Solution of Laplace's Equation in Cylindrical and Toroidal Configurations with Rectangular Sectional Shapes and Rotation-Symmetrical Boundary Conditions," J. Appl. Phys., 47(8), pp. 3740-3744.
26. Heerens, W. C., 1986, "Application of Capacitance Techniques in Sensor Design," J. Phys. E, 19, pp. 897-906.
27. Lazzarini, A., 1986, "Sources of Error in Dynamic Applications of Electronic Displacement Sensors," Rev. Sci. Instrum., 57(12), pp. 3099-3106.
28. Hicks, T., and Atherton, P. D., 2000, Nanopositioning Book, Penton Press, London.
29. Rosa, E. B., and Dorsey, N. E., 1907, Bull. Bur. Stds., 3, pp. 433-604.
30. Khan, A. R., Brown, I. J., and Brown, M. A., 1980, "The Behavior of Capacitance Displacement Transducers Using Epoxy Resin as an Electrode-Guard Ring Spacer," J. Phys. E, 13, pp. 1280-1281.
31. Genossar, I., and Steinitz, M., 1990, "A Tilted-Plate Capacitance Displacement Sensor," Rev. Sci. Instrum., 61(9), pp. 2469-2471.
32. Harb, S. M., Chetwynd, D. G., and Smith, S. T., 1995, "Tilt Errors in Parallel Plate Capacitive Micrometry," International Progress in Precision Engineering 8th International Precision Engineering Seminar, Elsevier, Compiegne, France pp. 147-150.
33. Brown, M. A., and Bulleid, C. E., 1978, "The Effect of Tilt and Surface Damage on Practical Capacitance Displacement Transducers," J. Phys. E, 11, pp. 429-432.
34. Puers, R., and Lapadatu, D., 1996, "Electrostatic Forces and Their Effects on Capacitive Mechanical Sensors," Sens. Actuators, A, 56, pp. 203-210.
35. Bonse, M. H. W., Mul, C., and Spronck, J. W., 1995, "Finite-Element Modelling as a Tool for Designing Capacitive Position Sensor," Sens. Actuators, A, 46-47, pp. 266-269.
36. Ansel, Y., Romanowicz, B., Renaud, P. and Schrofer, G., 1998, "Global Model Generation for a Capacitive Silicon Accelerometer by Finite Element Analysis," Sens. Actuators, A, 67, pp. 153-158.
37. Khan, S. H., Grattan, K. T. V., and Finkelstein, L., 1999, "Investigation of Leakage Flux in a Capacitive Angular Displacement Sensor Used in Torque Motors by 3D Finite Element Field Modeling," Sens. Actuators, A, 76, pp. 253-259.
38. Kuijpers, A. A., Krijnen, G. J. M., Wiegerink, R. J., Lammerink, T. S. I., and Elwenspoek, M., 2003, "2D-Finite-Element Simulations for Long-Range Capacitive Position Sensor," J. Micromech. Microeng., 13, pp. S183-S189.
39. Lányi, S., 1998, "Analysis of Linearity Errors of Inverse Capacitance Position Sensors," Meas. Sci. Technol., 9, pp. 1757-1764.
40. Gladwin, M. T., and Wolfe, J., 1975, "Linearity of Capacitance Displacement Transducers," Rev. Sci. Instrum., 46(8), pp. 1099-1100.
41. Smith, P., 2003, Analysis and Application of Capacitive Displacement Sensors to Curved Surfaces, Master's thesis, University of Kentucky, Lexington, KY.