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Volumn 9, Issue 10, 1998, Pages 1757-1764

Analysis of linearity errors of inverse capacitance position sensors

Author keywords

Capacitive sensors position sensors linearity finite element method

Indexed keywords

CAPACITANCE POSITION SENSORS;

EID: 0032184561     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/10/016     Document Type: Article
Times cited : (21)

References (16)
  • 12
    • 85034772324 scopus 로고    scopus 로고
    • Lányi Š 1997 Proc. 2nd Seminar on Quantitative Microscopy: Geometrical Measurements in the Micro- and Nanometre Range with Far and Near Field Methods November 6th and 7th 1997 Vienna ed K Hasche et al (Braunschweig: Physikalisch-Technische Bundesanstalt) p 48
    • Lányi Š 1997 Proc. 2nd Seminar on Quantitative Microscopy: Geometrical Measurements in the Micro- and Nanometre Range with Far and Near Field Methods November 6th and 7th 1997 Vienna ed K Hasche et al (Braunschweig: Physikalisch-Technische Bundesanstalt) p 48


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.