Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 25-32

  Storgaard Larsen, Torben ^a   Bouwstra, Siebe ^b   Leistiko, Otto ^b  

^a Bruel & Kjaer Danmark   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Accelerometers; Bragg gratings; Opto mechanical sensors; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFRACTION GRATINGS; FIBER OPTIC SENSORS; OPTICAL WAVEGUIDES; STRAIN;

BRAGG GRATINGS; OPTOMECHANICAL ACCELEROMETERS; PLANAR WAVEGUIDES;

ACCELEROMETERS;

EID: 0030102033     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80121-X     Document Type: Article

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