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Volumn 248, Issue 1-4, 2005, Pages 428-432
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Deposition of ITO films on SiO 2 substrates
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Author keywords
Atomic force microscopy; Indium tin oxide; Laser ablation; Pulsed ablation deposition; Refractive index
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
EXCIMER LASERS;
LASER ABLATION;
LASER PULSES;
LIGHT TRANSMISSION;
LIQUID CRYSTAL DISPLAYS;
PLASMA DISPLAY DEVICES;
REFRACTIVE INDEX;
SILICA;
SUBSTRATES;
COMPUTER CODES;
FILM THICKNESS PROFILOMETERS (FTP);
INDIUM TIN OXIDES (ITO);
PULSED ABLATION DEPOSITION (PAD);
INDIUM COMPOUNDS;
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EID: 19844377526
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.03.082 Document Type: Conference Paper |
Times cited : (20)
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References (33)
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