Laser bending for high-precision curvature adjustment of microcantilevers

Applied Physics Letters

Volumn 86, Issue 2, 2005, Pages

  Zhang, X Richard ^a   Xu, Xianfan ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; FINITE ELEMENT METHOD; LASER BEAMS; LASERS; MICROPROCESSOR CHIPS; PARAMETER ESTIMATION; PRECISION ENGINEERING; SENSORS; SILICON;

HIGH-PRECISION CURVATURE; LASER BENDING; MICROCANTILEVERS; THERMAL STRESSES;

CANTILEVER BEAMS;

EID: 19744382758     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1851617     Document Type: Article

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