Microfabricated mechanical biosensor with inherently differential readout

Applied Physics Letters

Volumn 83, Issue 8, 2003, Pages 1659-1661

  Savran, C A ^a,b   Burg, T P ^a,c   Fritz, J ^a,d   Manalis, S R ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c USA   (United States)

^d JACOBS UNIVERSITY BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; MICROMACHINING; READOUT SYSTEMS;

MICROFABRICATION;

BIOSENSORS;

EID: 0043283899     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1605238     Document Type: Article

References (11)

1. H. J. Butt, J. Colloid Interface Sci. 180, 251 (1996).
2. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Güntherodt, Ch. Gerber, and J. K. Gimzewski, Science 288, 316 (2000).
3. G. Wu, R. H. Datar, K. M. Hansen, T. Thundat, R. J. Cote, and A. Majumdar, Nat. Biotechnol. 19, 856 (2001).
4. Y. Arntz, J. D. Seelig, H. P. Lang, J. Zhang, P. Hunziker, J. P. Ramseyer, E. Meyer, M. Hegner, and Ch. Gerber, Nanotechnology 14, 86 (2003).
5. C. A. Savran, A. W. Sparks, J. Sihler, J. Li, W.-C. Wu, D. E. Berlin, T. P. Burg, J. Fritz, M. A. Schmidt, and S. R. Manalis, J. Microelectromech. Syst. 11, 703 (2002).
6. N. Loh, M. A. Schmidt, and S. R. Manalis, J. Microelectromech. Syst. 11, 182 (2002).
7. S. R. Manalis, S. C. Minne, A. Atalar, and C. F. Quate, Appl. Phys. Lett. 69, 3944 (1996).
8. D. L. Harame, L. J. Bousse, J. D. Shott, and J. D. Meindl, IEEE Trans. Electron Devices 34, 1700 (1987).
9. H.-F. Ji, K. M. Hansen, Z. Hu, and T. Thundat, Sens. Actuators B 72, 233 (2001).
10. J. Lai, T. Perazzo, Z. Shi, and A. Majumdar, Sens. Actuators A 58, 113 (1997).
11. R. C. Weast and M. J. Astle, CRC Handbook of Chemistry and Physics, 59th ed. (CRC, Boca Raton, FL, 1979).